Vacuum motors for the next semiconductor production machines
The high-vacuum linear motors are used in semiconductor production tools. Accuracies of these machines are in the nano meter range. Any disturbance by heat, magnetic field or out gassing in vacuum influences the sensitive processes. Therefore the design and production of the vacuum motors is taken one step further. The motors have strict mechanical tolerances to achieve maximum efficiency and mechanical features are added to make them vacuum compatible. Their magnetic design minimizes the magnetic field at the outside of the motor. All materials are measured and selected specifically for low out gassing in vacuum. The goal of this product line is to deliver high-quality vacuum motors with the right performance for the right price.