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Metrology Systems

Improve reliability and sustainability of measurements to acquire the key indicators for equipment processes like position, dimensions & acceleration.

Faster and more accurate measurements are enabled with our metrology solutions for the industrial and semiconductor equipment markets. We improve reliability and sustainability of measurements to acquire the key indicators for equipment processes like position, dimensions, acceleration.

If your application requires micrometer down to nano meter measurement systems we provide the right technologies in the form factor fit for use. We employ all our capabilities in conceptual thinking, optical design and (stray) light ray tracing, extremely sensitive acquisition circuits, quality validation and automated manufacturing to enable most innovative solutions exploring the boundaries of technologies and physics. 

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In-situ and Ultra-high Vacuum Options
Telecentric Optics
Laser-based Measurement Systems
Interferometry

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