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Prodrive Technologies' Pin Point offers maximum flexibility to have high accuracy position measurement solution for integration into highprecision motion systems, ideally suited for (vacuum) stages where high reliability matters with long availability solutions. Our solutions offer absolute measurement combined with uncompromised digital integration options for seamless synchronization between the measurement system and motion control system with sub-nanosecond time accuracies. Our decades of experience in the semiconductor industries combined with optical expertise provide an innovative interferometer solution focusing on OEM Equipment suppliers to reduce the cost of systems while providing lowered operational and maintenance costs through high availability over the years.
| Number of sensor axes per MU | 1-6 |
| Working distance | 0-6000mm |
| Target velocity | 0-1 m/s |
| Sensor resolution | 25 pm |
| Sensor repeatability | 200 pm (In vacuum conditions) |
| Measurement bandwidth per axis | 40 MHz (optical) 5 MHz digital output |
| Signal stability (2.5s) | 0.1nm |
| Thermal drift | <50nm / C |
| Default mode | Relative displacement single ended |
| Differential measurement | Included |
| Homing feature software | Included |
| Absolute distance measurement | Included; 20s |
| Sensor alignment | Manual on sensorhead |
| Target alignment | Visible laser (600nm) |
| Temperature | 15-35 C |
| Pressure | High Vacuum - Ambient |
| Humidity | 0 -95 % (non-condensing) |
| Availability | 10yrs+ |
| Lifetime | 10yrs+ |
| Output | Sin/Cos, S0S90, ENDAT, EtherCat G/G10 |
| Power supply | 12VDC; aw |
| Configuration lnteriace | Web-based, PMP-based |
| Fibre length | Up to 5 meter |
| Laser source wavelength | 1550nm; class 2 |
