Prodrive Technology’s Pico Scaler offers a high accuracy position measurement solution for precise motion systems. The Pico Scalar is ideal for (vacuum) stages where high reliability and long availability matters. Our solution features sub-nanosecond latency synchronization and absolute position measurement. We combine this with uncompromised digital integration options for seamless synchronization between the measurement and motion control system. Prodrive optical expertise provides innovative interferometer solutions focusing on reducing TCO (total cost of ownership) for our OEM Equipment partners; reducing direct cost of systems, while providing lowered operational and maintenance costs. For over two decades Prodrive Technologies has been a research, development and production partner for the semiconductor industry. Combining this experience with our robust quality management system, we understand what it takes to implement copy exact and change control, supporting our solutions from concept to end-of-life and beyond.
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| Number of sensor axes per MU | 1 – 6 |
| Working distance | 0 – 6000 mm |
| Target velocity | 0 – 1 m/s |
| Sensor resolution | 25 pm |
| Sensor repeatability | 200 pm (In vacuum conditions) |
| Measurement bandwidth per axis | 40 MHz (optical) |
| 5 MHz digital output | |
| Signal stability (2.5s) | 0.1nm |
| Thermal drift | < 50nm / C |
| Default mode | Relative displacement single ended |
| Differential measurement | Included |
| Homing feature software | Included |
| Absolute distance measurement | Included; 20s |
| Sensor alignment | Manual on sensorhead |
| Target alignment | Visible laser (600nm) |
| Temperature | 15 – 35 C |
| Pressure | High Vacuum - Ambient |
| Humidity | 0 – 95 % (non-condensing) |
| Availability | 10 yrs+ |
| Lifetime | 10 yrs+ |
| Output | Sin/Cos, S0S90, ENDAT, EtherCat G/G10 |
| Power supply | 12VDC; 8W |
| Configuration Interface | Web-based, PMP-based |
| Fibre length | Up to 5 meter |
| Laser source wavelength | 1550nm; Class 3B |
