浦卓科技的Pico Scaler为精密运动系统提供高精度位置测量解决方案。Pico Scalar为（真空）阶段提供高可靠性和长期可用性的方案。我们的解决方案具有纳秒级延迟同步和绝对位置测量。我们将其与数字集成选项结合，来实现测量和运动控制系统无缝同步。浦卓光学专业技术为我们的OEM设备合作伙伴提供创新的干涉仪解决方案，专注于降低TCO（总体拥有成本）；降低系统的直接成本，同时降低运营和维护成本。二十多年来，浦卓科技一直是半导体行业的研发和生产合作伙伴。结合这一经验和我们强大的质量管理体系，我们了解实施精确复制和更改控制需要什么，支持我们从概念到寿命结束以及以后的解决方案。
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| Number of sensor axes per MU | 1 – 6 |
| Working distance | 0 – 6000 mm |
| Target velocity | 0 – 1 m/s |
| Sensor resolution | 25 pm |
| Sensor repeatability | 200 pm (In vacuum conditions) |
| Measurement bandwidth per axis | 40 MHz (optical) |
| 5 MHz digital output | |
| Signal stability (2.5s) | 0.1nm |
| Thermal drift | < 50nm / C |
| Default mode | Relative displacement single ended |
| Differential measurement | Included |
| Homing feature software | Included |
| Absolute distance measurement | Included; 20s |
| Sensor alignment | Manual on sensorhead |
| Target alignment | Visible laser (600nm) |
| Temperature | 15 – 35 C |
| Pressure | High Vacuum - Ambient |
| Humidity | 0 – 95 % (non-condensing) |
| Availability | 10 yrs+ |
| Lifetime | 10 yrs+ |
| Output | Sin/Cos, S0S90, ENDAT, EtherCat G/G10 |
| Power supply | 12VDC; 8W |
| Configuration Interface | Web-based, PMP-based |
| Fibre length | Up to 5 meter |
| Laser source wavelength | 1550nm; Class 3B |
