Novel design of plasma RF power module


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Novel design of plasma RF power module


Prodrive Technologies is a developer and manufacturer of world-class electronics. It comprises over 1300 employees and is one of the fastest growing companies in Europe. Our organization is mostly based on two groups: Development and Operations. The Development department is oriented at developing first-class electronic, mechanic and software solutions. The operations department is responsible for production, assembly, testing and life-cycle-management of electronic products and systems in the range of 1 to more than a million pieces per year.

RF Power is a relatively new discipline within Prodrive Technologies. We work in close cooperation with the Eindhoven University of Technology on this matter to develop new technologies in this field.


Plasma is used for deposition and etching of layers in the semiconductor industry. One of the excitation techniques to form a plasma is by using RF excitation of a power source, at different frequencies but most often at 13.56 MHz. Typically up to 6 kW of RF power is required. During startup of the plasma and processing of the wafer, impedances may change drastically in very short timespans (ms range), whereas the deposition and etching processes demand extreme process control due to the very thin layers (nm range) used in this industry.

In this project a concept shall be designed for a 1.5 or 3 kW RF power generator module capable of meeting the requirements of the semiconductor manufacturing industry. Focus will be on highly stable output in terms of power and frequency and integration of impedance matching within this module.


Depending on the available time of the student (9/12 months):

  • Study of semiconductor manufacturing industry requirements for a RF generator
  • Comparison of possible design concepts
  • Detailed design and production of a functional prototype
  • Validation of the concept
  • Evaluation of the concept in report

Important note: all our graduation assignments are dependent on time. Please see them as an example of the many great things you can do at Prodrive Technologies. If you have the same passion for technology as we do, we always have an assignment for you!


Benefits as a student

Next to the benefits which are true for every Prodriver that are listed below, some special benefits must be highlighted for students. First of all you will be treated as a real Prodriver. Your opinion and ideas will be heard and treated as full. Next to this you will get the chance to work with colleagues with a very high level of knowledge in their field and get the chance to use our world class lab and production facilities for your graduation assignment.





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