Novel design of plasma RF power module

MSc

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Novel design of plasma RF power module

Context

Prodrive Technologies is a developer and manufacturer of world-class electronics. It comprises over 1300 employees and is one of the fastest growing companies in Europe. Our organization is mostly based on two groups: Development and Operations. The Development department is oriented at developing first-class electronic, mechanic and software solutions. The operations department is responsible for production, assembly, testing and life-cycle-management of electronic products and systems in the range of 1 to more than a million pieces per year.

RF Power is a relatively new discipline within Prodrive Technologies. We work in close cooperation with the Eindhoven University of Technology on this matter to develop new technologies in this field.

Assignment

Plasma is used for deposition and etching of layers in the semiconductor industry. One of the excitation techniques to form a plasma is by using RF excitation of a power source, at different frequencies but most often at 13.56 MHz. Typically up to 6 kW of RF power is required. During startup of the plasma and processing of the wafer, impedances may change drastically in very short timespans (ms range), whereas the deposition and etching processes demand extreme process control due to the very thin layers (nm range) used in this industry.

In this project a concept shall be designed for a 1.5 or 3 kW RF power generator module capable of meeting the requirements of the semiconductor manufacturing industry. Focus will be on highly stable output in terms of power and frequency and integration of impedance matching within this module.

Deliverables

Depending on the available time of the student (9/12 months):

  • Study of semiconductor manufacturing industry requirements for a RF generator
  • Comparison of possible design concepts
  • Detailed design and production of a functional prototype
  • Validation of the concept
  • Evaluation of the concept in report

Important note: all our graduation assignments are dependent on time. Please see them as an example of the many great things you can do at Prodrive Technologies. If you have the same passion for technology as we do, we always have an assignment for you!

 

Benefits as a student

Next to the benefits which are true for every Prodriver that are listed below, some special benefits must be highlighted for students. First of all you will be treated as a real Prodriver. Your opinion and ideas will be heard and treated as full. Next to this you will get the chance to work with colleagues with a very high level of knowledge in their field and get the chance to use our world class lab and production facilities for your graduation assignment.

浦卓的福利

当你可以证明自己是浦卓的合适人选时,你会在多方面得到回报:你将在公司内获得个人发展的机会,习得大量的专业知识并可在多个方向建立自己的职业规划。浦卓会定期与你一起评估你的职业规划,确保其与你自己制定的个人发展计划相符。除此之外,你会毫无疑问地获得一份非常有市场竞争力的薪资水平以及福利标准。你的薪资会随着你的专业发展一同快速增长,你甚至有机会成为公司的持股人。以上所有都可以在浦卓得以实现。浦卓科技在过去的20多年里保持着每年平均25%的增长速率,可以为你提供一个优秀的发展平台。

关于浦卓

世界上只有为数不多的几家远负盛名的高科技公司。根据我们客户的用户体验,浦卓有幸成为其中之一。浦卓科技是由几位毕业于爱因霍芬理工大学的技术人才于1993年创立的。从那之后,得益于成功的商业理念以及年轻有活力的团队(员工平均年龄28岁),浦卓科技每年都以惊人的速度在发展壮大。现如今,浦卓科技在全球拥有超过1300名技艺精湛、积极性高并且目标导向的员工,全职人力工时1100。

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