|
| Number of sensor axes per MU | 1-6 |
| Working distance | 0-1000mm |
| Target velocity | 0-2 m/s |
| Sensor resolution | 25 pm |
| Sensor repeatability | 200 pm (In vacuum conditions) |
| Signal stability (2.5s) | 0.1nm |
| Thermal drift | <50nm / C |
| Default mode | Relative displacement single ended |
| Differential measurement | Included |
| Homing feature software | Included |
| Absolute distance measurement | Included; 20s |
| Sensor alignment | Manual on sensor head |
| Target alignment | Visible laser (600nm) |
| Temperature | 15-35 C |
| Pressure | High Vacuum - Ambient |
| Humidity | 0 -95 % (non-condensing) |
| Availability | 10yrs+ |
| Lifetime | 10yrs+ |
| Output | Sin/Cos, AquadB, SSI, EtherNet, EtherCAT |
| Power supply | 12VDC; 8W |
| Configuration lnterface | Web-based, PMP-based |
| Fibre length | Up to 5 meter |
| Laser source wavelength | 1550nm; class 2 |
