浦卓科技的高精度位置测量解决方案集成到高精度运动系统中,提供最大的灵活性,非常适合高可靠性和长可用性解决方案的(真空)阶段。我们的解决方案提供绝对测量,结合不受影响的数字集成选项,测量系统和运动控制系统之间实现亚纳秒时间精度的无缝同步。我们在半导体行业数十年的经验结合光学专业知识,提供了一个创新的干涉仪解决方案,专注于OEM设备供应商,以降低系统成本,同时通过多年来的高可用性提供降低操作和维护成本。
Number of sensor axes per MU | 1-6 |
Working distance | 0-1000mm |
Target velocity | 0-2 m/s |
Sensor resolution | 25 pm |
Sensor repeatability | 200 pm (In vacuum conditions) |
Signal stability (2.5s) | 0.1nm |
Thermal drift | <50nm / C |
Default mode | Relative displacement single ended |
Differential measurement | Included |
Homing feature software | Included |
Absolute distance measurement | Included; 20s |
Sensor alignment | Manual on sensor head |
Target alignment | Visible laser (600nm) |
Temperature | 15-35 C |
Pressure | High Vacuum - Ambient |
Humidity | 0 -95 % (non-condensing) |
Availability | 10yrs+ |
Lifetime | 10yrs+ |
Output | Sin/Cos, AquadB, SSI, EtherNet, EtherCAT |
Power supply | 12VDC; 8W |
Configuration lnterface | Web-based, PMP-based |
Fibre length | Up to 5 meter |
Laser source wavelength | 1550nm; class 2 |