Gryphon Series

Vacuum-compatible Gryphon ironless linear motors

Ironless linear motors have a stationary array of magnets that form the magnetic yoke, on either side of a movable coil unit that drives the load. They give smooth linear motion with accurate force levels that are proportional to the current, and extremely low force ripple. They have low mass and high acceleration.

Our vacuum-compatible long-stroke ironless Gryphon linear motors work in semiconductors and other manufacturing cleanrooms. They generate up to 414 N peak force and eliminate cogging force to produce motion with negligible force ripple for excellent servo performance. The motor constant is up to 1330 N²/W, and the maximum speed is 1.5 m/s. 

Flat-wire technology maximizes heat transfer from coil to housing. The magnet yokes end with optional shielding plates to minimize the magnetic leakage fields. That makes them particularly suitable for use around electron beams. Negligible attraction force makes installation easier because there’s no magnetic force when the power is off.

They work seamlessly with our servo drives and motion controllers, and our Prodrive Motion Platform (PMP) control software.

Typical applications include those needing high precision:

• Moving wafers and other delicate components for semiconductor manufacturing.
• Moving glass substrates and other components for flat panel display manufacture.
• Moving probes and other components for inspection and chip processing equipment.
• Moving components for laboratory equipment like electron microscopes and spectrometers.