Actuators complying with 1e-7 torr use special coatings, connectors and adjusted mechanical geometry. Design is verified by inhouse RGA.
An integrated connector allows for easy installation and servicing without the need to remove the cabling.
An integrated position sensor based upon Hall sensor measurements can be included. It can both be used for position control and commutation.
Forced cooling by means of pressurized air or water can be integrated into the stator depending on customer requirements.
Magnetic shielding can be added optionally depending on customer requirements. The shielding will be designed to minimize performance impact.
Actuators for 1e-8 torr have additional metal housing around the coil unit to eliminate any outgassing of epoxy materials. Design is verified by inhouse RGA.