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真空电机

用于实现在无污染真空环境中的高效运动

浦卓科技研发的适用于真空应用的电机设计可实现低工作压力和低释气值,从而能将对敏感流程的影响降到最低。借助浦卓内部的 RGA 系统,我们对真空电机所用到的每一种材料单独进行分析以实现低释气率。这为我们制造标准和高真空系列的真空电机创造了条件。标准真空电机采用高性价比制式密封线圈单元,可实现最低 1e-5 Pa 的工作压力。高性能电机采用具有更低释气率的材料,适合高真空应用。通过采用矩形铜线,增大了所有真空电机的致密度,从而提高了工作效率,降低了真空系统的热负荷。

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定制化
高性价比
详细 RGA 分析
清洁的制造

组态

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Vacuum compatibility 1e-7 torr

Actuators complying with 1e-7 torr use special coatings, connectors and adjusted mechanical geometry. Design is verified by inhouse RGA.

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Vacuum compatibility 1e-8 torr

Actuators for 1e-8 torr have additional metal housing around the coil unit to eliminate any outgassing of epoxy materials. Design is verified by inhouse RGA.

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Magnetic Shielding

Magnetic shielding can be added optionally depending on customer requirements. The shielding will be designed to minimize performance impact.

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Integrated connector

An integrated connector allows for easy installation and servicing without the need to remove the cabling.

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