Poseidon EGS

Poseidon EGS motion controllers control up to 40 axes at 20kHz

High-end semiconductor manufacturing can require high throughput while processing and measuring 300-mm wafers. Such high-performance applications need separate motion controllers and servo drives for fast and precise motion control.

The Poseidon EGS motion controllers use 5th gen Xeon Scalable processor, with up to 12 cores, to handle up to 40 high-speed synchronized axes at 20kHz or up to 100 axes at 10kHz. A 4-, 8- or 12-core x86 @ 2.4GHz processor can perform synchronized control of up to 8 (or 16 upon request) EtherCAT® buses for centralized, distributed, or hybrid networking. Individual buses can control separate parts of a single machine or allow low-latency control of individual EtherCAT SubDevices.

Centralized motion control

In centralized motion control systems, the controller unit receives all sensor information of the entire system, compares the measured data with the target positions, and generates the new setpoints for all connected EtherCAT SubDevices. It is ideal for the highest-performance motion control in Semiconductor, Flat-Panel-Display (FPD) manufacturing, and Advanced Packaging. The Poseidon EGS motion controllers can perform multi-axis positioning in semiconductor XYZ stage control, and inverse kinematics with up to 4th-order motion profiles to generate the best trajectory for each axis.

It comes in a 1U 19-inch rack version. Lifecycle support is 7+ years.

MATLAB^® and Simulink^® integration

The controllers can be programmed and tuned to the application using our advanced PMP (Prodrive Motion Platform) software. PMP is used by many players in the motion industry. It offers true real-time performance and tooling, and the flexibility to modify any control loop to your application needs. The MATLAB® and Simulink® integration tools allow the designing and implementation of any custom control algorithm.