The high-vacuum linear motors are used in semiconductor production tools. Accuracies of these machines are in the nano meter range. Any disturbance by heat, magnetic field or out gassing in vacuum influences the sensitive processes. Therefore the design and production of the vacuum motors is taken one step further. The motors have strict mechanical tolerances to achieve maximum efficiency and mechanical features are added to make them vacuum compatible. Their magnetic design minimizes the magnetic field at the outside of the motor. All materials are measured and selected specifically for low out gassing in vacuum. The goal of this product line is to deliver high-quality vacuum motors with the right performance for the right price.   

A linear actuator consists of an array of permanent magnets and a three-phase coil unit. These types of actuators are used in highly accurate positioning stages or customer specific systems. Our linear actuators portfolio consists of off-the-shelve and customer specific motors. One of the applications of the linear motor is the so-called MULTI project from our customer ThyssenKrupp.

As urbanization is increasing, buildings are getting higher, wider, and more complex. Traditional elevators just aren’t keeping up. MULTI is a real game changer in the area of elevators. Because it moves sideways too, building design won’t be limited by the vertical alignment of elevator shafts. This allows for more visionary ideas that couldn’t be realized until now. The MULTI elevator reduces the waiting time and is more space and energy efficient. We develop and manufacture the complete propulsion system for this elevator in house!