Our vacuum compatible motors are designed to achieve low working pressures and low outgassing values to minimize the impact on sensitive processes. Each material used in our vacuum motors is individually analyzed for low outgassing, with our in-house RGA system. This allows us to offer a standard and a high-vacuum line of vacuum motors. The standard vacuum motors achieve a working pressure down to 1e-5 Pa by applying a standard cost-efficient potted coil unit. The high-performance motors are suitable for high-vacuum, by applying materials with lower outgassing rates. By means of applying rectangular copper wires the packing factor of all vacuum motors is increased, which improves the efficiency and leads to a lower heat load on the vacuum system.Contact Us
Actuators complying with 1e-7 torr use special coatings, connectors and adjusted mechanical geometry. Design is verified by inhouse RGA.
Actuators for 1e-8 torr have additional metal housing around the coil unit to eliminate any outgassing of epoxy materials. Design is verified by inhouse RGA.
Magnetic shielding can be added optionally depending on customer requirements. The shielding will be designed to minimize performance impact.
An integrated connector allows for easy installation and servicing without the need to remove the cabling.