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Voice coil - Iris

High-Performance Short-Stroke Linear Actuator

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The Iris series voice coil actuators deliver exceptional performance for short-stroke applications requiring high bandwidth and low stiffness. Designed with an ironless architecture, Iris actuators eliminate attraction forces, ensuring smooth, frictionless motion and zero wear. This makes them ideal for semiconductor manufacturing, inspection systems, and active vibration isolation.

It is optimized for high force bandwidth, enabling rapid force changes and fast dynamic response without mechanical contact. This allows precise control in demanding applications where acceleration, settling time, and disturbance rejection are critical.

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  • Low stiffness & high bandwidth

    Ideal for short-stroke applications requiring fast and precise movement, enabling high-performance in semiconductor manufacturing and active vibration isolation.

  • Ironless design - zero attraction force

    No magnetic force when powered off, simplifying installation and eliminating friction or wear for long-lasting reliability.

  • Compact yet powerful

    Delivers up to 250 N continuous force and 1150 N peak force

  • Seamless integration

    Works flawlessly with Prodrive's servo drives

Application areas

  • Wafer inspection

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  • Advanced Packaging

    Advanced packaging
  • Lithography

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  • Atomic force microscope

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Technical specifications

Model Height (mm) Depth (mm) Width (mm) Peak Force (N) Continuous Force (N) Motor Constant (N^2/W) Stroke (+/- mm)
Iris-S-05 62 140 119 400 100 161 3.9
Iris-S-10 62 191 119 600 180 464 3.9
Iris-M-12 66 200 108 450 150 259 5.4
Iris-L-16 76 252 131 1150 250 770 5.4
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