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Vacuum linear motors - Gryphon

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High-force, ironless linear motors for vacuum environments

Designed for high-precision applications in vacuum and cleanroom environments, Gryphon motors deliver smooth, cogging-free motion thanks to their ironless design. With peak forces up to 414 N and speeds reaching 1.5 m/s, they enable fast and accurate positioning for semiconductor and inspection systems.

Advanced thermal management with flat-wire coil technology ensures efficient heat dissipation, while integrated PT1000 sensors provide precise temperature monitoring. Magnetic field shielding is incorporated for sensitive applications, minimizing interference and ensuring optimal performance in environments with strict electromagnetic requirements. Gryphon motors integrate seamlessly with Prodrive servo drives and motion controllers for a complete motion solution.

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  • Vacuum-compatible Design

    Engineered for high-vacuum environments, ensuring zero contamination and reliable performance in semiconductor and inspection applications.

  • Ironless technology for smooth motion

    Delivers extremely low force ripple and eliminates cogging forces, enabling precise linear movement with excellent servo performance.

  • Magnetic Field Shielding for Sensitive Applications

    Incorporates advanced magnetic shielding to minimize electromagnetic interference, ensuring reliable performance in environments with strict sensitivity requirements.

  • Optimized thermal management

    Flat-wire coil technology maximizes heat transfer, while integrated PT1000 sensors ensure accurate temperature monitoring for stable operation.

  • Connectivity

    Equipped with a vacuum compatible connector that simplifies cable replacement and maintenance while preserving system cleanliness and uptime.

Application areas

  • Electron microscopy & scientific instruments

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  • Flat panel display manufacturing

    Flat panel display
  • EUV lithography

    Lithography
  • Photomask repair

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Technical specifications

Model Gryphon-M Gryphon-L
Height (mm) 39 45
Depth (mm) 118 135
Number of coils 9 12
Width (mm) 263 371
Peak Force (N) 269 414
Continuous Force (N) 161 249
Motor Constant (N²/W) 566 1330
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